This new system is part of our large investment program to introduce graphene technology in commercial devices
Aixtron has announced a new order for a BM Pro system from Spanish company Graphenea. Graphenea's focus is in developing graphene-based films for use in the semiconductor industry.
Graphenea placed the order for the 8-inch configuration deposition system during the first quarter of 2016. The tool is scheduled for delivery later this year which will be followed by the installation and commissioning of the system by Aixtron's European support team.
Aixtron's BM Pro system, now in its 3rd generation, has been specifically optimised for high quality graphene deposition with Graphenea's tool having the highest throughput to date.
Dr. Amaia Zurutuza, Scientific Director, Graphenea, said, "Our existing Aixtron BM Pro system has been a reliable workhorse in producing graphene for our needs. In taking the graphene to the next level, we chose an Aixtron BM Pro tool again because of its scalable technology which addresses our graphene production needs of even higher throughput and larger areas. Also, the system meets our requirements of high temperature operation, combined with excellent uniformity. System flexibility, low maintenance, automatic recipe execution and process support were other compelling reasons for selecting Aixtron again."
Jesus de la Fuente, CEO Graphenea, said, "This new system is part of our large investment program to introduce graphene technology in commercial devices. Our focus is to integrate graphene materials in CMOS (complementary metal-oxide-semiconductor) fabs starting with 8-inch wafers and 12-inch in the near future."
AIXTRON SE is a worldwide leading provider of deposition equipment to the semiconductor industry. The Company was founded in 1983 and is headquartered in Herzogenrath (near Aachen), Germany, with subsidiaries and sales offices in Asia, United States and in Europe. AIXTRON’s technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials. Such components are used in a broad range of innovative applications, technologies and industries. These include LED applications, display technologies, data storage, data transmission, energy management and conversion, communication, signaling and lighting as well as a range of other leading-edge technologies.
OVPD technology has been exclusively licensed to AIXTRON from Universal Display Corporation (UDC), Ewing, N.J. USA for equipment manufacture. OVPD technology is based on an invention by Professor Stephen R. Forrest et al. at Princeton University, USA, which was exclusively licensed to UDC. AIXTRON and UDC have jointly developed and qualified OVPD® pre-production equipment.
Graphenea, a technology company set up in 2010, is one of Europe’s main producers of graphene. In 2013 the company received an investment from Repsol to boost its technological capacity, support its growth as a business and enable it to maintain its international lead within the emerging graphene production sector.
The company, which employs 11 people and exports graphene materials to 40 countries, supplies its products to global operations for Universities, Research Centers and Industries. Graphenea is part of a growing cluster of nanotechnology companies based at the nanotechnology research centre, CIC nanoGune. The CIC nanoGUNE is a center created with the mission of addressing basic and applied world-class research in nanoscience and nanotechnology, fostering high-standard training and education of researchers in this field, and promoting the cooperation between science community agents and the industrial sector.
Graphenea is a partner of the Graphene Flagship. The EU launched this 10-year investment push research programme that aims to find ways of commercialising graphene.