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CPI and Heidelberg Instruments develop R2R digital lithography tool for OTFTs

The new tool is available on an open access basis, allowing companies to progress their current sheet processes towards roll to roll production of flexible OTFT arrays

15 Feb 2016 | Editor

The Centre for Process Innovation (CPI) and Heidelberg Instruments have announced that they have developed a new high resolution, high speed roll to roll digital lithography tool for the manufacture of flexible organic thin film transistors (OTFT) used in next generation applications such as foldable display screens, sensors, integrated circuits and photo-detectors.

The machine, which is installed at CPI’s National Printable Electronics Facility in County Durham, is considered a stepping stone in the commercialisation of printable electronic devices and can continuously manufacture OTFTs directly onto rolls of plastic film at rates approaching 0.1 m2/min.

According to CPI digital lithography, sometimes referred to as “laser direct imaging” or LDI, eliminates the need for photomasks by guiding a laser with computer generated imagery to directly expose light-sensitive material. This substantially reduces production time and lowers manufacturing cost, opening the technology up for shorter production runs and custom designs.

CPI says that the key feature of the new tool is its ability to expose rolls of film with digital images generated in real time, allowing it to dynamically compensate for any distortions present in each layer of the transistor as it is built up. It does this by using a state-of-the-art optical exposure engine along with a laser and digital mirror device capable of through-putting up to 150 megabytes per second of image data.

The system is capable of four micron line and space resolution in the printed pattern using a print density equivalent to twenty five thousand dots per inch. It uses an exposure wavelength of 355 nanometres and is compatible with a wide range of standard i-line photoresist materials as well as being suitable for other UV-curing processes.

CPI and Heidelberg Instruments - R2R digital lithography tool for OTFTs

Figure: CPI and Heidelberg Instruments - R2R digital lithography tool for OTFTs

The digital lithography line compliments existing organic semiconductor device manufacturing capability at CPI and it will also be of interest to companies who require high resolution continuous patterning of thin films on plastic.

The project received financial assistance from:

  • Innovate UK through the European Commission’s ERA-NET Plus scheme OLAE+ (project number 620063)
  • German Federal Ministry of Education and Research, funding program Photonics Research Germany (contract number 13N12635)
Dr Tom Harvey, Business Development Manager at CPI, said, "CPI has been establishing the capability and know-how to develop high performing flexible OTFTs for some time now. We have a qualified process for the manufacture of OTFT's at batch scale. The new tool is available on an open access basis, allowing companies to progress their current sheet processes towards roll to roll production, enabling significant reductions in the costs and times associated with new product development of flexible OTFT arrays."
Roland Kaplan, R&D Manger at Heidelberg Instruments, said, "We developed the write engine for this roll to roll lithography tool based on our experiences in high resolution optics, UV Laser and DMD technology. The main aspects were the modularity of the optical engine, the flexibility of the interfaces to the control system and the capability to handle the high speed data volume. The roll to roll lithography write engine perfectly fits into our family of maskless aligner tools which are commercially available at Heidelberg Instruments."

www.uk-cpi.com    www.himt.de   


About Centre for Process Innovation (CPI)

The Centre for Process Innovation is a UK-based technology innovation centre and part of the High Value Manufacturing Catapult. We use applied knowledge in science and engineering combined with state of the art development facilities to enable our partners to develop, prove, prototype and scale up the next generation of products and processes.

Our open innovation model enables clients to develop products and prove processes with minimal risk. We provide assets and expertise so our customers can demonstrate the process before investing substantial amounts of money in capital equipment and training. New products and processes can be shown to be feasible; on paper, in the lab and in the plant before being manufactured at an industrial scale.

By utilising our proven assets and expertise companies can take their products and processes to market faster. There is no down time in production as all of the process development is completed offsite and our technology transfer and engineering teams can help companies to transfer the product or process into full scale production at speed.

Source: Centre for Process Innovation (CPI)

About Heidelberg Instruments

With an installation base of over 600 systems in more than 50 countries, Heidelberg Instruments Mikrotechnik GmbH is a world leader in production of high precision maskless lithography systems.

Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Source: Heidelberg Instruments


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